The Keithley 237 is a high-voltage Source-Measure Unit (SMU) designed for simultaneous sourcing and measuring of voltage or current. Acting as four instruments in one, it offers four-quadrant operation with voltage capability up to 1100V and current up to 100mA, alongside advanced sweeping, pulsing, and 4-terminal measurement capabilities.
Specifications
General
| Parameter | Value |
|---|---|
| Interfaces | IEEE-488 |
| Warm-up Time | 1 hour (to rated accuracy) |
Physical
| Parameter | Value |
|---|---|
| Operating Temperature | 0 to 50 |
| Cooling | Forced air (internal fan) |
Voltage Sourcing Specifications
| Parameter | Value |
|---|---|
| Voltage Source Ranges | ±1.1 V, ±11 V, ±110 V, ±1100 V |
| Maximum Voltage Source | 1100 V |
| Minimum Voltage Source | 100 µV |
| Load Capacitance Stability | 20,000 pF (typical) |
Current Sourcing Specifications
| Parameter | Value |
|---|---|
| Current Source Ranges | ±1 nA, ±10 nA, ±100 nA, ±1 µA, ±10 µA, ±100 µA, ±1 mA, ±10 mA, ±100 mA |
| Maximum Current Source | 100 mA (10 mA maximum in higher voltage ranges) |
| Minimum Current Source | 100 fA |
Voltage Measurement Specifications
| Parameter | Value |
|---|---|
| Measurement Sensitivity (Voltage) | 10 µV |
Current Measurement Specifications
| Parameter | Value |
|---|---|
| Measurement Sensitivity (Current) | 10 fA |
Sweep and Pulse Characteristics
| Parameter | Value |
|---|---|
| Source Operation | Four Quadrant |
System Speeds and Timing
| Parameter | Value |
|---|---|
| Maximum Source/Measure Rate | 1000 / second |
| Minimum Source-Delay-Measure Cycle Time | 1 ms |
| Maximum Reading Rate (to Internal Buffer) | 1 ms per point |
| Memory Buffer Size (Readings) | 1000 |
Connectivity and Interfaces
| Parameter | Value |
|---|---|
| Output Floating Range | Up to ±200 V from ground |
| Maximum Common Mode Voltage | 200 V |
Performance
| Parameter | Value |
|---|---|
| Maximum Output Power | 11 W |
| Best Voltage Measurement Resolution | 10 µV (on 1.1 V range) |
| Best Current Measurement Resolution | 10 fA (on 1 nA range) |
| Best Voltage Source Resolution | 100 µV (on 1.1 V range) |
| Best Current Source Resolution | 100 fA (on 1 nA range) |
| Input Impedance | >10^14 Ω |
Control & Triggering
| Parameter | Value |
|---|---|
| Trigger Sources | Front panel, IEEE-488 bus, External (BNC) |
Measurement
| Parameter | Value |
|---|---|
| Measurement Sensing | Selectable 2-wire (local) or 4-wire (remote) |
| Guard Output | Driven guard |
Safety & Protection
| Parameter | Value |
|---|---|
| Safety Interlock | Required for 1100V high-voltage operation |
Inputs & Outputs
| Parameter | Value |
|---|---|
| External Trigger Connections | BNC (Trigger In / Trigger Out) |
Environmental
| Parameter | Value |
|---|---|
| Storage Temperature | -25°C to +65°C |
Technology
Source-Measure Unit (SMU)
Applications
Semiconductor and Component Characterization