6514

The Keithley 6514 is a highly sensitive 5½-digit electrometer designed for low-current, high-resistance, voltage, and charge measurements. It combines state-of-the-art measurement performance with high reading speeds and a cost-effective design, making it an essential instrument for research and production testing of sensitive electronics and materials.

Current Measurement Material Analysis Resistance Measurement Voltage Measurement

Specifications

General

Parameter	Value
Interfaces	GPIB (IEEE-488.2), RS-232, Digital I/O, Trigger Link
Display	5½-digit Vacuum Fluorescent Display (VFD)

Physical

Parameter	Value
Power Supply	90–134 V / 180–250 V AC, 50 Hz, 60 Hz, or 400 Hz (auto-sensing), <40 VA
Operating Temperature	0°C to 50°C
Dimensions (W×H×D)	214 mm × 90 mm × 369 mm
Weight	2.8 kg

Measurement Ranges and Resolution

Parameter	Value
Current Measurement Range	20 pA to 20 mA
Voltage Measurement Range	2 V to 200 V
Resistance Measurement Range	2 kΩ to 200 GΩ
Charge Measurement Range	20 nC to 20 µC
Voltage Range - 2 V	Resolution: 10 µV
Voltage Range - 20 V	Resolution: 100 µV
Voltage Range - 200 V	Resolution: 1 mV
Current Range - 20 mA	Resolution: 100 nA
Charge Range - 20 nC	Resolution: 10 fC
Charge Range - 200 nC	Resolution: 100 fC
Charge Range - 2 µC	Resolution: 1 pC
Charge Range - 20 µC	Resolution: 10 pC
Resistance Range - 2 kΩ	Resolution: 10 mΩ
Resistance Range - 20 kΩ	Resolution: 100 mΩ
Resistance Range - 200 kΩ	Resolution: 1 Ω
Resistance Range - 2 MΩ	Resolution: 10 Ω
Resistance Range - 20 MΩ	Resolution: 100 Ω
Resistance Range - 200 MΩ	Resolution: 1 kΩ
Resistance Range - 2 GΩ	Resolution: 10 kΩ
Resistance Range - 20 GΩ	Resolution: 100 kΩ
Resistance Range - 200 GΩ	Resolution: 1 MΩ

Measurement Accuracy and Performance

Parameter	Value
Voltage Accuracy - 2 V Range	±(0.025% of reading + 4 counts)
Voltage Accuracy - 20 V Range	±(0.025% of reading + 3 counts)
Voltage Accuracy - 200 V Range	±(0.06% of reading + 3 counts)
Current Accuracy - 20 mA Range	±(0.1% of reading + 5 counts)
Charge Accuracy - 20 nC Range	±(0.4% of reading + 5 counts)
Charge Accuracy - 200 nC Range	±(0.4% of reading + 5 counts)
Charge Accuracy - 2 µC Range	±(0.4% of reading + 5 counts)
Charge Accuracy - 20 µC Range	±(0.4% of reading + 5 counts)
Resistance Accuracy - 2 kΩ Range	±(0.20% of reading + 10 counts)
Resistance Accuracy - 20 kΩ Range	±(0.10% of reading + 5 counts)
Resistance Accuracy - 200 kΩ Range	±(0.10% of reading + 5 counts)
Resistance Accuracy - 2 MΩ Range	±(0.10% of reading + 5 counts)
Resistance Accuracy - 20 MΩ Range	±(0.15% of reading + 5 counts)
Resistance Accuracy - 200 MΩ Range	±(0.25% of reading + 5 counts)
Resistance Accuracy - 2 GΩ Range	±(1.5% of reading + 5 counts)
Resistance Accuracy - 20 GΩ Range	±(1.5% of reading + 5 counts)
Resistance Accuracy - 200 GΩ Range	±(1.5% of reading + 5 counts)
Input Bias Current	<3 fA at 23°C
Input Impedance	>200 TΩ (>2 × 10^14 Ω) in parallel with <20 pF
Normal Mode Rejection Ratio (NMRR)	>60 dB at 50 Hz or 60 Hz (with line sync enabled)
Common Mode Rejection Ratio (CMRR)	>120 dB at DC, 50 Hz or 60 Hz

Input and Guarding Characteristics

Parameter	Value
Input Connector Type	3-lug Triaxial (rear panel)
Maximum Input Voltage (Normal Mode)	250 V peak
Maximum Input Voltage (Common Mode)	500 V peak (between LO and chassis ground)
Isolation (LO to Chassis)	>10^10 Ω in parallel with 150 pF

Measurement Speed and Memory

Parameter	Value
Reading Rate to Internal Buffer	Up to 1200 readings/second (at 4½ digits)
Reading Rate to IEEE-488 Bus	Up to 1150 readings/second (at 4½ digits)
Internal Buffer Memory Capacity	2500 readings

System Interfaces and Control

Parameter	Value
Analog Output Full Scale	±2 V
Analog Output Impedance	1 kΩ
Digital I/O Port Configuration	4 outputs (open collector), 1 input
Programming Language	SCPI (Standard Commands for Programmable Instruments)

Environmental and Standards Compliance

Parameter	Value
Storage Temperature Range	-25°C to 65°C
Warm-up Time	1 hour to rated accuracy

Accessories and Software

Parameter	Value
Included Accessories	Model 237-ALG-2 Low Noise Triaxial Cable

Input Specifications

Parameter	Value
Input Capacitance	< 20 pF

Measurement Resolution

Parameter	Value
Maximum Voltage Resolution	10 µV
Maximum Current Resolution	100 aA
Maximum Resistance Resolution	10 mΩ
Maximum Charge Resolution	10 fC

Analog Outputs

Parameter	Value
Preamp Output Impedance	1 kΩ

Connectivity

Parameter	Value
Preamp and Analog Output Connector	BNC

Power Specifications

Parameter	Value
Power Consumption	100 VA
Line Voltage Range	90–125 V AC / 180–250 V AC
Line Frequency Range	50 Hz / 60 Hz

Environmental Specifications

Parameter	Value
Operating Humidity Range	0% to 70% RH up to 35 °C (linearly derated 3% RH/°C from 35 °C to 50 °C)
Maximum Operating Altitude	2000 m

Compliance & Safety

Parameter	Value
Safety Certifications	Conforms to European Union Directive 73/23/EEC, EN 61010-1
EMC Certifications	Conforms to European Union Directive 89/336/EEC, EN 61326-1

Current Measurement

Parameter	Value
Voltage Burden (20 pA to 2 µA ranges)	< 20 µV
Voltage Burden (20 µA to 200 µA ranges)	< 100 µV
Voltage Burden (2 mA range)	< 1 mV
Voltage Burden (20 mA range)	< 5 mV

Resistance Measurement

Parameter	Value
Test Current (2 kΩ range)	1 mA
Test Current (20 kΩ range)	100 µA
Test Current (200 kΩ range)	10 µA
Test Current (2 MΩ range)	1 µA
Test Current (20 MΩ range)	100 nA
Test Current (200 MΩ range)	10 nA
Test Current (2 GΩ range)	1 nA
Test Current (20 GΩ range)	100 pA
Test Current (200 GΩ range)	10 pA

Guard Output

Parameter	Value
Guard Output Impedance	< 1 Ω
Guard Output Maximum Current	2 mA
Guard Output Offset Voltage	< 1 mV

Outputs

Parameter	Value
Preamp Output Voltage Range	±2 V for full-scale input

Interfaces & I/O

Parameter	Value
GPIB Connector Type	24-pin IEEE-488.1
RS-232 Connector Type	9-pin D-sub
Digital I/O Connector Type	9-pin D-sub
Trigger Link Connector Type	8-pin micro DIN
RS-232 Baud Rates	300, 600, 1200, 2400, 4800, 9600, 19200 bps
Digital I/O Configuration	4 open-collector outputs, 1 TTL input
Digital I/O Max Sink Current	100 mA
Digital I/O Max Pull-up Voltage	30 V

Integration

Parameter	Value
Aperture Integration Range	0.01 NPLC to 10 NPLC

Power

Parameter	Value
Line Voltage Selection Method	Rear panel manual slide switch

Technology

Solid-state electrometer

Applications

Low-current, high-impedance electrical characterization