The Keysight (Agilent/HP) 4142B is a highly flexible, modular DC source/monitor mainframe designed for high-speed, high-precision semiconductor parametric test and characterization. Featuring an 8-slot expandable architecture, it accommodates a variety of plug-in measurement modules—such as Source/Monitor Units (SMUs), High Voltage Source Units (HVSUs), High Current Source Units (HCSUs), and Voltage Source/Monitor Units (VS/VMUs)—to support specialized test requirements in both lab and automated production environments.
Specifications
General
| Parameter | Value |
|---|---|
| Interfaces | GPIB (HP-IB) |
| Display | None (status LED indicators only) |
| Warm-Up Time | 40 minutes |
Physical
| Parameter | Value |
|---|---|
| Operating Temperature | 5 °C to 40 °C |
| Dimensions (W×H×D) | 426 mm × 235 mm × 512 mm |
| Weight | 15 kg |
Mainframe Architecture & Capacity
| Parameter | Value |
|---|---|
| Total Number of Module Slots | 8 |
| Maximum Number of SMU Channels | 8 (using 1-slot modules) |
| Built-in Ground Unit (GNDU) | Yes |
| GNDU Maximum Sink Current | 1.6 A |
| GNDU Connection Terminal | Triaxial |
| Internal Command Language | FLEX Command Set |
| Internal Measurement Buffer | 4096 readings |
| Backplane Synchronization | Built-in real-time synchronization between plug-in modules |
Sourcing & Measurement Capabilities
| Parameter | Value |
|---|---|
| Minimum Current Measurement Resolution | 20 fA |
| Minimum Voltage Measurement Resolution | 4 µV |
| Maximum Sourcing Voltage | ±1000 V (with HP 41423A) |
| Maximum Sourcing Current | ±10 A (with HP 41422A) |
| Voltage Measurement Accuracy | 0.05% |
| Current Measurement Accuracy | 0.2% |
| Spot Measurement Speed | 4 ms (typical for Vth or hfe measurements) |
| Sourcing Modes | DC, Pulsed |
| Sweep Types | Linear, logarithmic, dual-channel staircase |
| Measurement Modes | Spot, staircase sweep, pulsed spot, pulsed sweep, analog search |
HP 41420A High Power SMU
| Parameter | Value |
|---|---|
| HPSU Slot Width | 2 slots |
| HPSU Maximum Voltage | ±200 V |
| HPSU Maximum Current | ±1 A (at ≤ 20 V) |
| HPSU Maximum DC Sourcing Power | 20 W |
| HPSU Sourcing Voltage Ranges | 2 V, 20 V, 40 V, 100 V, 200 V |
| HPSU Sourcing Current Ranges | 10 nA, 100 nA, 1 µA, 10 µA, 100 µA, 1 mA, 10 mA, 100 mA, 1 A |
| HPSU Minimum Voltage Sourcing Resolution | 40 µV |
| HPSU Minimum Current Sourcing Resolution | 200 fA |
HP 41421B Medium Power SMU
| Parameter | Value |
|---|---|
| MPSU Slot Width | 1 slot |
| MPSU Maximum Voltage | ±100 V |
| MPSU Maximum Current | ±100 mA |
| MPSU Maximum DC Sourcing Power | 2 W |
| MPSU Sourcing Voltage Ranges | 2 V, 20 V, 40 V, 100 V |
| MPSU Sourcing Current Ranges | 10 nA, 100 nA, 1 µA, 10 µA, 100 µA, 1 mA, 10 mA, 100 mA |
| MPSU Minimum Voltage Sourcing Resolution | 40 µV |
| MPSU Minimum Current Sourcing Resolution | 200 fA |
HP 41422A High Voltage Source Unit
| Parameter | Value |
|---|---|
| HVSU Slot Width | 2 slots |
| HVSU Maximum Voltage | ±1000 V |
| HVSU Maximum Current | ±10 mA (at ±1000 V), ±20 mA (at ±500 V) |
| HVSU Sourcing Voltage Ranges | 200 V, 1000 V |
HP 41424A VS/VM Unit
| Parameter | Value |
|---|---|
| VS/VMU Slot Width | 1 slot |
| VS Sourcing Channels | 2 channels |
| VM Monitoring Channels | 2 channels |
| VS Channel Output Range | ±20 V |
| VS Channel Max Current Output | ±100 mA |
| VM Channel Max Input Voltage | ±20 V |
HP 41425A High Current Source Unit
| Parameter | Value |
|---|---|
| HCSU Slot Width | 2 slots |
| HCSU Maximum Peak Current | ±20 A (pulsed) |
| HCSU Maximum Sourcing Voltage | ±40 V (at ≤ 1 A DC) |
| HCSU Current Ranges | 100 mA, 1 A, 10 A (pulsed), 20 A (pulsed) |
Pulsed Sourcing & Measurement
| Parameter | Value |
|---|---|
| HPSU/MPSU Pulse Width Range | 1 ms to 50 ms (in 100 µs steps) |
| HCSU Pulse Width Range | 100 µs to 1 ms |
Triggering & Synchronization
| Parameter | Value |
|---|---|
| External Trigger Input Connector | BNC female |
| External Trigger Output Connector | BNC female |
Guarding & Shielding
| Parameter | Value |
|---|---|
| Safety Interlock Terminal | Yes (rear panel, 3-pin connector) |
| Interlock Voltage Threshold | High voltage output (at >40 V) is disabled unless interlock loop is closed |
Physical Characteristics
| Parameter | Value |
|---|---|
| Cooling Configuration | Forced-air cooling (internal rear-mounted fan) |
Power Requirements
| Parameter | Value |
|---|---|
| Line Voltage | 100 V / 120 V / 220 V / 240 V (±10%, selectable) |
| Line Frequency Range | 47 Hz to 66 Hz |
| Maximum Power Consumption | 750 VA |
Memory & Buffer
| Parameter | Value |
|---|---|
| Command Program Memory Capacity | 2000 lines |
Measurement Performance
| Parameter | Value |
|---|---|
| Integration Time Settings | Short, Medium (1 PLC), Long (16 PLC) |
Connectivity
| Parameter | Value |
|---|---|
| HP-IB Interface Capabilities | SH1, AH1, T6, L4, SR1, RL1, PP0, DC1, DT1, C0 |
VS/VMU Module Specifications
| Parameter | Value |
|---|---|
| VM Channel Voltage Ranges | 2 V, 20 V |
| VM Channel Minimum Voltage Resolution | 100 µV |
| VS Channel Voltage Ranges | 20 V, 40 V |
| VS Channel Minimum Voltage Sourcing Resolution | 1 mV |
MPSU Module Specifications
| Parameter | Value |
|---|---|
| MPSU Current Measurement Ranges | 1 nA, 10 nA, 100 nA, 1 µA, 10 µA, 100 µA, 1 mA, 10 mA, 100 mA |
| MPSU Voltage Measurement Ranges | 2 V, 20 V, 40 V, 100 V |
HPSU Module Specifications
| Parameter | Value |
|---|---|
| HPSU Voltage Measurement Ranges | 2 V, 20 V, 40 V, 200 V |
| HPSU Current Measurement Ranges | 1 nA, 10 nA, 100 nA, 1 µA, 10 µA, 100 µA, 1 mA, 10 mA, 100 mA, 1 A |
Triggering
| Parameter | Value |
|---|---|
| External Trigger Input Signal Type | TTL level, active low or active high |
| External Trigger Output Signal Type | TTL level, active low or active high pulse |
Interfaces
| Parameter | Value |
|---|---|
| HP-IB Subset Compatibility | SH1, AH1, T6, L4, SR1, RL1, PP0, DC1, DT1, C0, E1 |
Compliance & Safety
| Parameter | Value |
|---|---|
| Safety Standards | CSA C22.2 No. 1010.1, EN 61010-1 |
| EMC Standards | CISPR 11: Group 1, Class A; EN 55011: Group 1, Class A |
Accessories
| Parameter | Value |
|---|---|
| Compatible Test Fixtures | HP 16087A, HP 16088A |
Technology
Semiconductor Parametric Analyzer / Source Measure Unit (SMU) Mainframe
Applications
Semiconductor device characterization, parametric testing, wafer-level testing, and high-speed DC/pulsed measurements