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B1500A

Keysight Technologies (Agilent HP)Semiconductor

The Keysight Technologies B1500A is a modular, high-precision Semiconductor Device Analyzer designed for comprehensive characterization of electronic materials and devices. Featuring a 10-slot mainframe, it supports a wide variety of Source Monitor Units (SMUs), Capacitance Measurement Units (MFCMUs), and Waveform Generator/Fast Measurement Units (WGFMUs) to enable extremely sensitive DC, AC, and ultra-fast pulsed measurements.

Material AnalysisSemiconductor TestingSource Measure Unit

Specifications

General

ParameterValue
InterfacesGPIB, LAN (10/100/1000Base-T), USB 2.0 (Front x2, Rear x2), Trigger In/Out, Interlock, VGA, Digital I/O
Display15-inch XGA active matrix TFT color touch screen (1024 x 768 resolution)

Physical

ParameterValue
Power Supply100 V to 240 V AC (±10%), 50 Hz to 60 Hz (±10%), maximum 900 VA
Operating Temperature5 °C to 40 °C
Dimensions (W×H×D)426 mm × 330 mm × 575 mm
Weight20 kg (mainframe empty)

General System Architecture

ParameterValue
Ground Unit (GNDU) Output Voltage0 V ± 100 uV
Ground Unit (GNDU) Maximum Sink Current4.2 A
Maximum Number of Slots10 slots
Supported Module TypesHRSMU, MPSMU, HPSMU, MCSMU, MFCMU, HV-SPGU, WGFMU
Internal ADC ResolutionHigh-resolution ADC (up to 25-bit) and High-speed ADC (16-bit)
Measurement Processing Speed100 us minimum sampling interval
Ground Unit (GNDU) Output TerminalTriaxial connector

Source Monitor Unit (SMU) Specifications

ParameterValue
Maximum Voltage Force Range±200 V (HPSMU)
Minimum Voltage Force Resolution0.5 uV (HRSMU)
Maximum Current Force Range±1 A (HPSMU/MCSMU)
Minimum Current Force Resolution1 ff (without ASU), 1 fA (with ASU)
Maximum Voltage Measurement Range±200 V (HPSMU)
Minimum Voltage Measurement Resolution0.5 uV (HRSMU)
Maximum Current Measurement Range±1 A (HPSMU/MCSMU)
Minimum Current Measurement Resolution0.1 fA (HRSMU)
SMU Isolation Impedance>= 10^13 ohms
SMU Connection TypesKelvin triaxial connections

Measurement Modes & Stimulus Functions

ParameterValue
Sweep Measurement ModesLinear, Logarithmic, Pulsed, Single, Double Sweep
Sampling Measurement ModesLinear, Logarithmic, up to 100,000 points
Pulsed Sweep Measurement ModesPulse sweep, Pulse-and-sweep, Pulsed sampling
Hold Time Setting Range0 to 655.35 s
Delay Time Setting Range0 to 65.535 s
Integration Time SettingsAuto, PLC (0.01 to 100 PLC), Time (100 us to 2 s)

Multi-Frequency Capacitance Unit (MFCMU)

ParameterValue
Measurement Frequencies1 kHz to 5 MHz
Frequency Resolution1 mHz (at 1 kHz to 10 kHz)
AC Drive Voltage Range1 mV to 250 mV rms
AC Drive Voltage Resolution1 mV
Internal DC Bias Voltage Range±25 V
Internal DC Bias Voltage Resolution1 mV

Pulse Generator Unit (PGU) & Ultra-Fast I-V

ParameterValue
Number of Pulse ChannelsUp to 10 channels (with 5 SPGU modules)
Pulse ModeTwo-level pulse, three-level pulse
Amplitude Range±10 V (into 50 ohms) or ±20 V (open circuit)
Amplitude Resolution1 mV
Pulse Width Range10 ns to 10 s
Pulse Period Range20 ns to 10 s
Transition Time Range (Rise/Fall)8 ns to 10 ms
WGFMU Minimum Sampling Interval10 ns
WGFMU Minimum Pulse Width100 ns

User Interface & Display Capabilities

ParameterValue
Display Type15-inch XGA active matrix TFT color LCD
Display Resolution1024 x 768 pixels
Plot Display FormatsX-Y, X-Y1-Y2, List, Roll, Trace
Analysis ToolsMarkers, Cursors, Line Approximation, Auto-Scale
Front Panel Keypad/ControlsTouch screen

Connectivity, Interfaces & Storage

ParameterValue
GPIB Interface SupportYes (IEEE-488)
LAN Interface10BASE-T / 100BASE-TX / 1000BASE-T
Interlock ConnectorYes
External Trigger Inputs/OutputsBNC connectors
Internal Storage TypesHard Disk Drive (HDD) or Solid State Drive (SSD)

Software & Programming

ParameterValue
Built-in Operating SystemWindows 10 Pro (or Windows 7 on older units)
Application Software CompatibilityEasyEXPERT group+ software
Built-in Semiconductor Device LibrariesOver 300 application libraries

Power & Operating Environment

ParameterValue
Line Voltage Input Range100 V to 240 V AC (±10%)
Maximum Power Consumption900 VA
Storage Temperature Range-20 °C to +60 °C
Operating Humidity Range20% to 70% RH (non-condensing)
Altitude LimitsOperating: up to 2,000 m; Non-operating: up to 4,600 m
Cooling MechanismForced air cooling by internal fans

Compliance & Certifications

ParameterValue
Safety Standards ComplianceIEC61010-1, CAN/CSA-C22.2 No. 61010-1, UL61010-1
Electromagnetic Compatibility (EMC) standardsEN61326-1, AS/NZS CISPR 11
Calibration Interval1 year

Measurement Modules

ParameterValue
MPSMU Maximum Voltage and Current±100 V, ±100 mA
HPSMU Maximum Voltage and Current±200 V, ±1 A
MCSMU Maximum Voltage and Current±30 V, ±1 A (pulsed) / ±100 mA (DC)
MFCMU Frequency Range1 kHz to 5 MHz
MFCMU Frequency Resolution1 mHz
MFCMU AC Signal Voltage Range10 mV to 250 mV rms
MFCMU DC Bias Range±25 V (built-in)
SPGU Maximum Output Channels2 channels per module (up to 10 channels per mainframe)
SPGU Pulse Voltage RangeUp to ±40 V (into open load)

Accessories

ParameterValue
DC Bias Range with SCUU±200 V (using SMU via SCUU)
Atto-sense and Switch Unit (ASU) Current Resolution0.1 fA minimum resolution
SMU CMU Unification Unit (SCUU) FunctionAutomatic switching between SMU and CMU measurements without cable reconnection

HRSMU Module Specifications

ParameterValue
HRSMU Maximum Voltage and Current100 V / 100 mA
HRSMU Minimum Current Measurement Resolution1 fA (0.1 fA with ASU)
HRSMU Minimum Current Force Resolution10 fA
HRSMU Minimum Voltage Force Resolution0.5 μV
HRSMU Minimum Voltage Measurement Resolution0.5 μV

WGFMU Module Specifications

ParameterValue
WGFMU Output Voltage Range±3 V, ±10 V
WGFMU Current Measurement Ranges1 μA, 10 μA, 100 μA, 1 mA, 10 mA

System Integration & Software

ParameterValue
Supported Switching Matrix ModelsKeysight B2200A, B2201A, E5250A
EasyEXPERT Software Execution ModesInteractive mode, GUI-less (COM) mode

Technology

Semiconductor Characterization & Parameter Analysis

Applications

High-precision characterization of semiconductor devices, materials, active components, and nanomaterials